JPS60239363A - 窒化けい素焼結体の製造法 - Google Patents
窒化けい素焼結体の製造法Info
- Publication number
- JPS60239363A JPS60239363A JP59095295A JP9529584A JPS60239363A JP S60239363 A JPS60239363 A JP S60239363A JP 59095295 A JP59095295 A JP 59095295A JP 9529584 A JP9529584 A JP 9529584A JP S60239363 A JPS60239363 A JP S60239363A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- weight
- pressure
- sintering
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 32
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000005245 sintering Methods 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 21
- 239000011521 glass Substances 0.000 description 12
- 239000012071 phase Substances 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- 229910052582 BN Inorganic materials 0.000 description 7
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000011345 viscous material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000013338 boron nitride-based material Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59095295A JPS60239363A (ja) | 1984-05-11 | 1984-05-11 | 窒化けい素焼結体の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59095295A JPS60239363A (ja) | 1984-05-11 | 1984-05-11 | 窒化けい素焼結体の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239363A true JPS60239363A (ja) | 1985-11-28 |
| JPH0146472B2 JPH0146472B2 (en]) | 1989-10-09 |
Family
ID=14133779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59095295A Granted JPS60239363A (ja) | 1984-05-11 | 1984-05-11 | 窒化けい素焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239363A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62105957A (ja) * | 1985-10-31 | 1987-05-16 | 京セラ株式会社 | 窒化珪素質焼結体およびその製造方法 |
| JPS63100067A (ja) * | 1986-06-12 | 1988-05-02 | 日本碍子株式会社 | 窒化珪素焼結体およびその製造法 |
| JPH0361711A (ja) * | 1989-04-28 | 1991-03-18 | Cummins Engine Co Inc | 焼結セラミックのボール・ソケット型ジョイント組立体 |
| US5002907A (en) * | 1987-11-26 | 1991-03-26 | Ngk Insulators, Ltd. | Homogenous silicon nitride sintered body |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128598A (ja) * | 1974-09-05 | 1976-03-10 | Tokyo Shibaura Electric Co | Arufuagatachitsukakeisofunmatsu no seizohoho |
| JPS5247015A (en) * | 1975-10-11 | 1977-04-14 | Kagaku Gijutsucho Mukizai | Manufacture of silicon nitride sintered bodies |
| JPS55113675A (en) * | 1979-02-22 | 1980-09-02 | Tokyo Shibaura Electric Co | Manufacture of si3n4 sintered body |
| JPS57106576A (en) * | 1981-11-02 | 1982-07-02 | Tokyo Shibaura Electric Co | Ceramic powder material |
-
1984
- 1984-05-11 JP JP59095295A patent/JPS60239363A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128598A (ja) * | 1974-09-05 | 1976-03-10 | Tokyo Shibaura Electric Co | Arufuagatachitsukakeisofunmatsu no seizohoho |
| JPS5247015A (en) * | 1975-10-11 | 1977-04-14 | Kagaku Gijutsucho Mukizai | Manufacture of silicon nitride sintered bodies |
| JPS55113675A (en) * | 1979-02-22 | 1980-09-02 | Tokyo Shibaura Electric Co | Manufacture of si3n4 sintered body |
| JPS57106576A (en) * | 1981-11-02 | 1982-07-02 | Tokyo Shibaura Electric Co | Ceramic powder material |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62105957A (ja) * | 1985-10-31 | 1987-05-16 | 京セラ株式会社 | 窒化珪素質焼結体およびその製造方法 |
| JPS63100067A (ja) * | 1986-06-12 | 1988-05-02 | 日本碍子株式会社 | 窒化珪素焼結体およびその製造法 |
| US5002907A (en) * | 1987-11-26 | 1991-03-26 | Ngk Insulators, Ltd. | Homogenous silicon nitride sintered body |
| JPH0361711A (ja) * | 1989-04-28 | 1991-03-18 | Cummins Engine Co Inc | 焼結セラミックのボール・ソケット型ジョイント組立体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0146472B2 (en]) | 1989-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |